CIC Tutorial (1)

內容摘要：

Biosensor is one of the most prosperous fields on the biotech industry in recent years. They are analytical devices that combine a biologically sensitive element with an electrical, physical, or chemical transducer to selectively and quantitatively detect the presence of specific compounds in a given external environment. During last decade, BioMEMS have been used as the biosensor to detect cells, proteins, DNA, or small molecular. The integration of biosensor in CMOS technology are attractive due to it can combine the digital, analog, RF, SiP, micro-fluid…etc. to realize the micro bio-sensing system or lab-on-a-chip (m-TAS). The biosensor category and application will be introduced in the presentation. Based on current CIC 0.35um MEMS process, CIC developed the gold process for biosensor platform. The biosensor could be made as mechanical, electrical, or optical type based on current platform. Besides, some preliminary piezoresistance cantilever characteristics and bio results are included in this presentation.